Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems

1. Plenary Lectures
2. Bulk and Topography Processing
3. Modeling
4. Thermo-Mechanical Modeling
5. Characterization, Parameter Extraction, Calibration
6. Equivalent Circuits, Behavioral and Multilevel Simulation
7. Discretization, Numerics, Computational Efficiency
8. Software Systems and Tools
9. Applications: Semiconductors
10. Applications: Chemical Sensors
11. Applications: Microfluidics
12. Applications: Pressure, Actuation, Navigation
13. Applications: Optics, Electromagnetics
14. Applications: Hall Effect, Storage