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Technical Program Co-Chairs |
| Matthew Laudon | Swiss Federal Institute of Technology of Lausanne, Switzerland |
| Bart Romanowicz | Massachusetts Institute of Technology, USA |
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Conference Co-Chairs |
| Andreas Wild | Motorola, Semiconductor Products Sector, USA |
| Philippe Renaud | Swiss Federal Institute of Technology of Lausanne, Switzerland |
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Program Committee |
| Kazuo Asaumi | Fuji Research Institute Corporation, Japan |
| Xavier J. R. Avula | University of Missouri-Rolla, USA |
| Henry Baltes | Swiss Federal Institute of Technology of Zurich, Switzerland |
| Franco Cerrina | UW-Madison, Center for X-ray Lithography, USA |
| Bum-Kyoo Choi | Samsung Electronics, Korea |
| Bernard Courtois | TIMA-CMP Laboratory, France |
| Selden Crary | University of Michigan, USA,
Danish Technical University, Denmark |
| Robert W. Dutton | Stanford University, USA |
| Roxann Engelstad | University of Wisconsin-Madison, USA |
| Toshio Fukuda | Nagoya University, Japan |
| William Johnson | Motorola, USA |
| Daniel Laird | Sandia National Labs, NM, USA |
| Mark E. Law | University of Florida, USA |
| Per Ljung | Coyote Systems, USA |
| Chris Menzel | Ford Microelectronics Inc., USA |
| Michael G. Pecht | University of Maryland, USA |
| P. V. M. Rao | Indian Institute of Technology-New Delhi, India |
| Avi K. Ray-Chaudhuri | Sandia National Laboratories, CA, USA |
| Helmut Seidel | Daimler-Benz AG, Germany |
| Stephen D. Senturia | Massachusetts Institute of Technology, USA |
| Armin Sulzmann | Swiss Federal Institute of Technology of Lausanne, Switzerland |
| Clayton Teague | National Institute of Standards and Technology, USA |
| Gerhard Wachutka | Technical University of Münich, Germany |
| Thomas Wiegele | Motorola, USA |
| Sung-Kie Youn | Korea Advanced Institute of Science and Technology, Korea |
| Jay N. Zemel | University of Pennsylvania, Philadelphia, USA |
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Conference Secretariat |
| Sarah Wenning | International Association of Microsystem and Microelectronic Modelers |
