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Conference Proceedings
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Sensors & Systems
| Organized by |
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Symposium Chairs
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Nano Electromechanical Devices: Opportunities and Challenges
Roger T. Howe
Stanford University, US
(speaker biography)
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A Designer’s Guide to CMOS MEMS
Gary K. Fedder
Carnegie Mellon University, US,
(speaker biography)
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Wireless Integrated MicroSystems (WIMS): Coming Revolution in the Gathering of Information,
Ken D. Wise,
University of Michigan, Ann Arbor, USA,
(speaker biography)
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Micropower Wireless Sensors
Anantha P. Chandrakasan
Massachusetts Institute of Technology, US,
(speaker biography)
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Confirmed Plenary Speakers
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Some Novel Applications for Wireless Inertial Sensors
Joe Paradiso
Massachusetts Institute of Technology, US,
(speaker biography)
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Inertial Sensors — Smart Sensor Design Challenges
Andrei M. Shkel
University of California, Irvine, US,
(speaker biography)
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Silicon Carbide Micro/Nano Systems for Harsh Environment and Demanding Applications,
Mehran Mehregany, Case Western Reserve University, US,
(speaker biography)
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Confirmed Invited Speakers
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Micro/Nanofabricated Biochemical Sensors
Ashwin A. Seshia
University of Cambridge, UK
(speaker biography)
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Micro Power Generation — MEMS and NEMS Systems
Skandar Basrour, TIMA Laboratory, FR
(speaker biography)
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Wireless Sensor Networks — System Design and Applications
Robert M. Newman, Coventry University, UK
(speaker biography)
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Optical Sensors — Smart Systems Design
Davies Monteiro, Universidade Federal de Minas Gerais, BR
(speaker biography)
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Symposium Sessions |
| | Monday May 8 |
| 6:00 | Poster Session 1 and Nanotech Exhibit Reception hosted by Advance Nanotech, booth #903 |
| | Tuesday May 9 |
| 8:30 | Keynote - Sensors & Systems: MEMS & NEMS, MSM |
| 10:30 | Sensors & Systems: MEMS Sensors |
| 10:30 | Sensors & Systems: Optical MEMS Systems |
| 1:30 | Sensors & Systems: Smart Systems |
| 1:30 | MSM: MEMS Device Modeling |
| 4:00 | Poster Session 2 and Nanotech Exhibit Reception hosted by Feinstein Kean Healthcare, booth #716 |
| | MEMS Device Modeling |
| | Wednesday May 10 |
| 8:30 | Keynote - Sensors & Systems: Microsystems: MSM |
| 8:30 | Keynote - Nanotech Materials and Chemistry: NanoFab: Nano Electronics |
| 10:30 | Sensors & Systems: Wireless Sensor Networks |
| 10:30 | Sensors & Systems: Chemical & Gas Sensing |
| 10:30 | Bio Sensors and Diagnostics: Sensors & Systems |
| 1:30 | Sensors & Systems: Wireless Sensor Networks |
| 1:30 | MSM: Novel MEMS Devices & Processes |
| 4:00 | Sensors & Systems: Novel MEMS, NEMS & Sensing |
| 6:00 | Poster Session 3 and Reception |
| | Sensor Systems |
| | Bio Sensors and Diagnostics |
| | Thursday May 11 |
| 8:30 | Keynotes - NanoFab: Nano Electronics |
| 10:30 | Bio Sensors and Diagnostics |
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Symposium Program |
| | Monday May 8 |
| Back to Top |
| 6:00 |
Poster Session 1 and Nanotech Exhibit Reception hosted by Advance Nanotech, booth #903 | Expo Hall |
| | Tuesday May 9 |
| Back to Top |
| 8:30 |
Keynote - Sensors & Systems: MEMS & NEMS, MSM | Room 112 |
| | Session chair: Elena Gaura, Coventry University, UK |
| 8:30 |
Nano Electromechanical Devices: Opportunities and Challenges (invited) R.T. Howe, Stanford University, US (speaker biography) |
| 9:15 |
A Designer’s Guide to CMOS MEMS (invited) G.K. Fedder, S. Simone and N. Sarkar, Carnegie Mellon University, US (speaker biography) |
| Back to Top |
| 10:30 |
Sensors & Systems: MEMS Sensors | Room 112 |
| | Session chair: Mehran Mehregany, Case Western Reserve University, USA |
| 10:30 |
A Novel Optical Waveguide Based Accelerometer F. Chen, Z. Salcic and J. Wang, The University of Auckland, NZ |
| 10:50 |
Optical Micro-Spectrometer with Sub-Nanometer Resolution I. Avrutsky, K. Chaganti, I. Salakhutdinov and G. Auner, Wayne State University, US |
| Back to Top |
| 10:30 |
Sensors & Systems: Optical MEMS Systems | Room 105 |
| | Session chair: Skandar Basrour, TIMA, Micro and Nano Systems Group, France |
| 10:30 |
Silicon MEMS for Photonic Bandgap Devices (invited) E.M. Yeatman and A. Lipson, Imperial College London, UK (speaker biography) |
| 11:00 |
Improvement of dynamic features of an adaptive optical system for detection and correction of ophthalmic distortions (invited) D.W. de Lima Monteiro, A.S.O. Furtado, O. Soloviev, A.I. Ferreira Jr, F.B. Teixeira, J.G.M. Melo and G. Vdovin, Universidade Federal de Minas Gerais, BR (speaker biography) |
| 11:20 |
A Multi-Purpose Optical MEMS Sensor for Harsh Environments P. Nieva, N. McGruer, G. Adams, University of Waterloo, CA |
| Back to Top |
| 1:30 |
Sensors & Systems: Smart Systems | Room 112 |
| | Session chair: Gary K Fedder, Carnegie Mellon University, USA |
| 1:30 |
Evolution of Chip-Scale Gyroscopes: From Solid-State to Atomic (invited) A.M. Shkel, University of California Irvine, US (speaker biography) |
| 2:00 |
Validation for Micro- and Nano-Sensors (invited) M. Henry, Oxford University, UK (speaker biography) |
| 2:30 |
“Smart” Holograms – A Novel Diagnostics Platform (invited) S. Kabilan, A.J. Marshall, A. Horgan, C.D. Creasey, S.J. Kew, K.E.S. Dean, S.F. Terrell, L.J. Affleck, Smart holograms, UK (speaker biography) |
| 3:00 |
Silicon Carbide Micro/Nano Systems for Harsh Environment and Demanding Applications (invited) M. Mehregany, X-A Fu and L. Chen, Case Western Reserve Univesity, US (speaker biography) |
| 3:30 |
Nanotechnology Enabled Research at the North Dakota's Center for Nanoscale Science and Engineering: Novel Approaches to Sensing (invited) D.B. Chrisey, North Dakota State University, US (speaker biography) |
| Back to Top |
| 1:30 |
MSM: MEMS Device Modeling | Room 106 |
| | Session chair: Bob Newman, Coventry University, UK |
| 1:30 |
Mechanical Properties Measurements of 0.35-µm BiCMOS MEMS Structures J. Liu, G.K. Fedder, S. Sassolini and N. Sarkar, Carnegie Mellon University, US |
| 1:50 |
MEMS Process Characterization with an on-Chip Device D. Garmire, H. Choo, R.S. Muller, S. Govindjee and J. Demmel, UC Berkeley, US |
| 2:10 |
Analytic Damping Model for a Square Perforation Cell T. Veijola, Helsinki University of Technology, FI |
| 2:30 |
Simulations of the Anchor Losses in MEM Disk Resonators D. Paci, S. Stoffels and H.A.C. Tilmans, IMEC, BE |
| 2:50 |
Adaptive Control for Reducing the Effect of Damping on the Output Signal of Microgyroscopes R. Khalilyulin, T. Hauck and G. Wachutka, Munich University of Technology, DE |
| 3:10 |
Microcantilever Sensor via Second Order Sliding Mode Control J. English, Y. Shtessel, M. Yegnaraman and M. George, University of Alabama in Huntsville, US |
| Back to Top |
| 4:00 |
Poster Session 2 and Nanotech Exhibit Reception hosted by Feinstein Kean Healthcare, booth #716 | Expo Hall |
| Back to Top |
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MEMS Device Modeling | Expo Hall |
| - |
Parameterizable Library Components for SAW Devices W.C. Wilson and G.M. Atkinson, NASA Langley Research Center, US |
| - |
Strong and Weak Inversion Mode of MOS in the Design of Direction Sensitivity Matrix M. Husak, A. Boura and J. Jakovenko, Czech Technical University in Prague, CZ |
| - |
Two-To-One Internal Resonance in Microscanners M.F. Daqaq, E.M. Abdel-Rahman and A.H. Nayfeh, Virginia Polytechnic Institute and State University, US |
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Manipulation of Capillary force by Electrowetting for Micromanipulation S. Chandra and C. Batur, University of Akron, US |
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Multiphysics Modeling and Simulation for a MEMS Thermal-Mechanical Switch W. Wang, R. Popuri, S. Onishi, J. Bumgarner and L. Langebrake, University of South Florida, US |
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Smart Pressure Sensor on SOI optimized by Finite Element Analysis for Heatspreader Integration B. Bercu, L. Montčs and P. Morfouli, INPG-MINATEC, FR |
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Modelling of Torsional Micromirrors with Springs made of Multiple Rotational Serpentine Elements J. You, M. Packirisamy and I. Stiharu, Concordia University, CA |
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Application of a Design Methodology Using a 2D Micro Scanner O. Anac and I. Basdogan, Koc University, TR |
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Sensitivity to Shape and Membrane Thickness Variations in Capacitive Pressure Sensors A. Sabet and X.J. Avula, Washington University in St. Louis, US |
| | Wednesday May 10 |
| Back to Top |
| 8:30 |
Keynote - Sensors & Systems: Microsystems: MSM | Room 112 |
| | Session chair: Elena Gaura, Coventry University, UK |
| 8:30 |
Wireless Integrated MicroSystems (WIMS): Coming Revolution in the Gathering of Information (invited) K.D. Wise, University of Michigan, US (speaker biography) |
| 9:15 |
Micropower Wireless Sensors (invited) A.P. Chandrakasan, N. Verma, J. Kwong, D. Daly, N. Ickes, D. Finchelstein, B. Calhoun, Massachusetts Institute of Technology, US (speaker biography) |
| Back to Top |
| 8:30 |
Keynote - Nanotech Materials and Chemistry: NanoFab: Nano Electronics | Room 210 |
| | Session chair: Leo Ocola, Argonne National Lab, US |
| 8:30 |
Integrating soft and hard materials in nanoscale based devices (invited) N. Petersen, NRC-CNRC, CA (speaker biography) |
| 9:15 |
Nanotechnology and Energy, the Smalley Vision: Be a Scientist-- Save the World (invited) W. Adams, Amy Jaffe and Richard Smalley(deceased), Smalley Institute, Rice University, US (speaker biography) |
| Back to Top |
| 10:30 |
Sensors & Systems: Wireless Sensor Networks | Room 112 |
| | Session chair: Ken D Wise, University of Michigan, USA |
| 10:30 |
Experimental Localization with MICA2 Motes M.P. Allen, E.I. Gaura, R.M. Newman and S.N.I. Mount, Coventry University, UK |
| 10:50 |
Size does matter – the case for big motes (invited) R.M. Newman and E.I. Gaura, Coventry University, UK (speaker biography) |
| 11:10 |
Wireless Micro and Nano Sensors for Physiological and Environmental Monitoring B. Kaminska, Simon Fraser University, CA |
| 11:30 |
Bridge Local Scour Monitoring System Using MEMS Sensor Zigbee Network Y-B Lin, C-C Lee, J-C Chen, K-C Chang and J-S Lai, National Center for Research on Earthquake Engineering, TW |
| Back to Top |
| 10:30 |
Sensors & Systems: Chemical & Gas Sensing | Room 104 |
| | Session chair: Davies de Lima Monteiro, OptMA lab, Universidade Federal de Minas Gerais, Brazil |
| 10:30 |
Micro/Nanofabricated Biochemical Sensors (invited) A. Seshia, University of Cambridge, UK |
| 11:00 |
Sensing of Organic Vapors by Flame-Made TiO2 Nanoparticles A. Teleki, S.E. Pratsinis, K. Kalyanasundaram and P.I. Gouma, ETH Zurich, CH |
| 11:20 |
Novel Sensing Array Nanomaterials: Molecularly-Mediated Assemblies of Nanoparticles C-J Zhong, S. Lu, L. Wang, X. Shi, M. Schadt, W. Hao and J. Luo, State University of New York at Binghamton, US |
| Back to Top |
| 10:30 |
Bio Sensors and Diagnostics: Sensors & Systems | Room 208 |
| | Session chair: Mehran Mehregany, Case Western Reserve University, USA |
| 10:30 |
Overview - Bio Sensors and Diagnostics (invited overview presentation) S. Iyer, Los Alamos National Laboratory, US |
| 11:00 |
Detection of Biological Species by Surface Enhanced Raman Scattering A. Sengupta, M. Volny, C.B. Wilson, F. Turecek and E.J. Davis, University of Washington, US |
| 11:20 |
Multi-plex biomolecular detection using Bio-nanotransduction J.R. Branen, University of Idaho, US |
| 11:40 |
Integrated Techniques for Transmembrane Protein Sensing S.J. Wilk, L. Petrossian, M. Goryll, T.J. Thornton, S.M. Goodnick, J.M. Tang and R.S. Eisenberg, Arizona State University, US |
| Back to Top |
| 1:30 |
Sensors & Systems: Wireless Sensor Networks | Room 112 |
| | Session chair: Bob Newman, Coventry University, UK |
| 1:30 |
Some Novel Applications for Wireless Inertial Sensors (invited) J.A. Paradiso, Massachusetts Institute of Technology, US (speaker biography) |
| 2:00 |
Augmented materials – micro and nano sensing (invited) K. Delaney, University College Cork, IE (speaker biography) |
| Back to Top |
| 1:30 |
MSM: Novel MEMS Devices & Processes | Room 104 |
| | Session chair: Skandar Basrour, TIMA, Micro and Nano Systems Group, France |
| 1:30 |
Electromechanical System for Lorentz Force Compensation P. Sekalski, A. Napieralski and S. Simrock, Technical University of Lodz, PL |
| 1:50 |
Negative-Poisson’s-Ratio (NPR) Microstructural Material by Soft-Joint Mechanism Y-W Lu, C-J Chang, P-T Lin and H-C Gea, Rutgers University, US |
| 2:10 |
Optimization of Diffractive MEMS for Optical Switching J. Verheggen, G. Panaman, W. Khan Raja and J. Castracane, University at Albany, SUNY, US |
| 2:30 |
Active Sealing for Soft Poymer Microchips H. Bang, W.G. Lee, J. Park, H. Yun, J. Lee, S. Chung, K. Cho, C. Chung, D-C Han and J.K. Chang, Seoul National University, KR |
| Back to Top |
| 4:00 |
Sensors & Systems: Novel MEMS, NEMS & Sensing | Room 112 |
| | Session chair: Ashwin Seshia, Cambridge University, UK |
| 4:00 |
Power Generation based on Micro-Electro Mechanical Devices (invited) S. Basrour, TIMA Laboratory, FR (speaker biography) |
| 4:30 |
A Bio-Inspired Rotor Powered by a Micro-Bubble J. Kao, J. Warren, J. Xu and D. Attinger, Columbia University, US |
| 4:50 |
MEMS-based solid propellant micro-rocket with micro-igniter on thin membrane for next generation of low-cost small space and aeronautic engines A. Chaalane, C. Rossi and D. Estčve, LAAS-CNRS, FR |
| Back to Top |
| 6:00 |
Poster Session 3 and Reception | Hall D |
| Back to Top |
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Sensor Systems | Hall D |
| - |
Odor sensor using quartz crystal microbalance coated with molecular recognition membrane H. Nanto, Y. Takei, T. Imamura and D. Ishigure, Kanazawa Institute of Technology, JP |
| - |
Fabrication technique for nanochannel with directed buckle patterning S. Chung, M-W Moon, K.H. Oh, D.C. Han, R.D. Kamm and J.W. Hutchinson, Massachusetts Institute of Technology, US |
| - |
An Analytical Model for Multi-layer and Multi-electrode Piezoelectric Ceramic Actuators B-L. Wang and Y-W. Mai, The University of Sydney, AU |
| - |
A Novel FSMA Actuation Mechanism for MIcrovalve Applications A. Agarwal, M. Kohl and W. Basuki, Indian Institute of Technology, IN |
| - |
MEMS Micro Spectrometer E.R. Schildkraut, D.J. Cavicchio and D. Reyes, Block MEMS, LLC, US |
| - |
Electrospun TiO2 nanofibers for gas sensing applications I-D Kim, A. Rothschild, H.L. Tuller, D.Y. Kim and S.M. Jo, Korea Institute of Science and Technology, KR |
| - |
A Nanoporous Silicon 1-D Photonic Band Gap Microcavity as a Selective Optical Sensor S. Chappel, L. DeLouise and B. Gersten, Queens College, US |
| - |
Sensitivity of Initially Stressed Un-symmetric Micro-Layered Plate in Large Deflection due to Lateral Load C-F. Chen, Chung-Hua University, TW |
| - |
The Dynamic Performance of a Micro-machined Coriolis Flow Meter C. Clark, S. Wang and R. Cheesewright, Brunel University, UK |
| - |
Trade-Offs in Cooperative Goal Seek using Nano-Devices S. Chnadrasekaran and D.F. Hougen, Oklahoma University, US |
| Back to Top |
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Bio Sensors and Diagnostics | Hall D |
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A Sensitive Peptide-Nanotube Based Pathogen Assay R.I. MacCuspie, I.A. Banerjee, S. Gummalla, H. Mostowski, P. Krause and H. Matsui, Hunter College, US |
| - |
Biomolecular diagnostics by a magnetic lab-on-a-chip H. Brückl, M. Eggeling, R. Heer, C. Nöhammer and J. Schotter, ARC Seibersdorf Research GmbH, AT |
| - |
Nanoengineered Encapsulation of Organic Microcrystal as Novel Biolabels W.C. Mak, K.Y. Cheung, R. Renneberg and D. Trau, National University of Singapore, SG |
| - |
Applications of Dielectrophoretic / electrohydrodynamic electrodes for concentration of biological nanoparticles H.O. Fatoyino, Y. Huebner, K.F. Hoettges, M.P. Hughes and F.H. Labeed, University of Surrey, UK |
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Fast and Easy Detection System of Protein Glycosylation by Using Resonant Energy Transfer between Nanoparticles E. Oh, D. Lee and H-S Kim, Korea Advanced Institute of Science and Technology, KR |
| - |
A Role for Antibodies to Fullerenes in the Nanobiosciences B.X. Chen and B.F. Erlanger, Columbia University, US |
| - |
Ligand-dependent changes in the SPR of magnetic nanoparticles L. Radu, D. Caruntu, M. White, J. Wiley, C.J. O’Connor and P. Hanson, University of New Orleans, US |
| - |
Stem Cell Differentiation Base on Acoustic Wave Sensor C-J Shih, B-C Tsai and K-L Ou, Industrial Technology research institute, TW |
| - |
Remote Manipulation of a Robotic Arm by Using Infrared Sensors N.E. Chávez Rodríguez and J. Esquivel Villar, UNAM, MX |
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Effects of Nanoporous Thin Film Parameters on LDI-MS Performance R.K. Hicks, S.J. Madrid, A.M. Dattelbaum, S. Iyer, Los Alamos National Laboratory, US |
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Marking a Conformational Change in Amyloid Beta Protein by Gold Colloidal Nanoparticles K. Yokoyama, D.R. Welchons and B. Johnson, The State University of New York at Geneseo, US |
| - |
Nanostructured Biomimetic Interfaces for Sensing Applications N. Kohli, D. Srivastava, R. Ofoli, I. Lee and M. Worden, Michigan State University, US |
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Nano sized CdSe as a sensor for lipid oxidative stress marker K.X. Hay, V.Y. Waisundara, M. Han and D. Huang, National University of Singapore, SG |
| | Thursday May 11 |
| Back to Top |
| 8:30 |
Keynotes - NanoFab: Nano Electronics | Room 112 |
| | Session chair: Leo Ocola, Argonne National Laboratory, US |
| 8:30 |
Nanomanufacturing Challenges (invited) D. Eaglesham, Applied Materials, US (speaker biography) |
| 9:15 |
Nanotechnology from the bottom up: Light-directed Synthesis of DNA molecules (invited) F. Cerrina, University of Wisconsin-Madison, US (speaker biography) |
| Back to Top |
| 10:30 |
Bio Sensors and Diagnostics | Room 106 |
| | Session chair: Bart Romanowicz, NSTI, US |
| 10:30 |
Using Surface Plasmon Propagation through Nanostructures for Chemical and Biological Sensing A. Benahmed and C-M Ho, UCLA, US |
| 10:50 |
Detection of Small Molecule-Protein Binding with Amorphous Silicon Nanostructures J. Lund, R. Mehta and B. Parviz, University of Washington, US |
| 11:10 |
The Method of Total Internal Reflection Ellipsometry in Biosesing: A. Nabok, A. Tsargorodskaya, N.F. Starodub and A. Holloway, Sheffield Hallam University, UK |
| 11:30 |
Layer by Layer Fabrication of an Amperometric Nanocomposite Biosensor for Sulfite S.B. Adeloju and A. Ohanessian, Water and Sensor Research Group, AU |
| 11:50 |
Nanoparticle Labels/ Electrochemical Immunosensor for Detection of Biomarkers G. Liu, J. Wang and Y. Lin, Pacific Northwest National Lab, US |
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Special Symposium
As MEMS become key components in pervasive computational systems,
microsystem designs are evolving from "stand alone" components to
systemically conceptualised application packages. Designers and
engineers are beginning to work closely with medics, artists,
environmental scientists and other end users to produce holistically
designed systems for novel application areas. Recent extraordinary
developments include using sense data as a basis for motion capture in
new media arts, in-body sensing with radio telemetry and planetary
exploration. These add to the impressive array of applications already
in common currency, such as environmental sensing, object tracking
with RFID and mobile office environments.
This symposium concerns the radical and big thinking required to
deliver new capabilities based on microsystem technologies. We are
interested in reporting on research and technology which addresses the
following challenges:
- MEMS design and integration
- MEMS components, such as RF and optical subsystems
- Sensor and actuator systems -- design and applications
- Signal processing associated with MEMS devices
- Smart and intelligent sensors
- RFID technology and applications
- MEMS markets and economic drivers
- Novel application areas for MEMS, such as in-body sensing, pervasive gaming and the creative arts
We look forward to receiving your submission.
Conference Activities
For this year’s Sensors and Systems we have designed a wide variety of
activities which we hope will create a hothouse for new and exciting
ideas in MEMS research and development. Along side oral and poster
presentations we will have keynotes and invited talks, graduate
student activities and workshops (all included in the conference
fee). More details will posted on the conference website.
Topics & Application Areas
- MEMS Design and Integration
- Pervasive Sensing
- Sensing Systems
- RF Devices
- Self Contained & Information Delivering Systems
- Intelligent Sensing Environments
- Smart Structures & Spaces
- Middleware Services & Agent Technologies for Intelligent MEMS
- Wireless Intelligent Sensor Networks
- Context Based & Implicit Intelligent Microsystems
- Usability Of Pervasive Sensing System Derived Information
- Wireless/Mobile Service Management & Delivery
- Ad Hoc Sensing/Actuation Networks
- Resource Management in Intelligent Sensor Networks
- Actuator Systems
- Chemical and Gas Sensors
- Bio Sensors
- Optical Sensors
- Mechanical Sensors
- Physical Sensors
- Sensor Applications
- Other
Graduate Activities at Nanotech 2006 - Sensor Systems Symposium
9th -10th May 2006
A) Graduate Forum
The Graduate Forum will allow PhD students the opportunity to showcase
their work to the Nanotech audience of leading academic and industrial
delegates. It will allow them to take advantage of a “master class”, led by
prominent experts in their domain and to receive feedback on their work.
Activity format: several 1 hour sessions with four 10min presentations back to
back followed by 20 minutes of discussions. The discussions will be led by a
panel of two experts and a chair.
Number of students: 12 students will be invited to participate in this activity.
If you would like to be involved, email the symposium chair
Note: abstract submission compulsory through the Symposium website, by the 18th November.
B) Graduate Tutorials
Four tutorials sampling the MEMS sensing domain of research will be offered to
graduate students.
The aim of the activity is to allow the students to broaden their horizons by
exposing them to neighbouring domains relatively to their PhD work focus.
The tutorials will be of 60-90min long and will be delivered by leading
industrial and academic experts.
If you would like to participate, email the symposium chair
Note: no supplementary fee is required for the tutorials, but all attendees
must be registered for the Conference. As places are limited, they are going to
be offered on a first come first served basis.
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