Nano Scale Electronic Processing

Symposium Chair: Doug Resnick, Motorola

Synopsis

Nanoprocessing in the world of electronics is already a reality. State of the art Complimentary Metal Oxide Semiconductor (CMOS) circuits follow 90 nm design rules today, and will reach 32 nm by the beginning of the next decade. Circuit performance is expected to become a big issue as the transistor gate length continues to decrease, and several researchers have suggested the integration of nanoscale materials such as carbon nanotubes (CNTs) and molecules as a means for extending this technology.

Electronics is by no means limited to CMOS technology. High definition displays are required for computer monitors, televisions and a myriad of handheld devices. The means for improving fidelity and brightness may require nanofabrication techniques such as the deposition a precise catalysts and the growth of CNT arrays. Surface Acoustic Wave devices require nanoscale dimensions to operate at higher frequencies. Other applications, to name a few, include compound semiconductor devices, filters, spin related devices, and patterned media.

For high volume applications, the industry typically uses expensive optical scanners to define critical features. Electron beam lithography tools have inherently better resolution and but are considerably slower than their optical counterparts.

Recently great progress has been made in alternative low cost imaging technologies. These include Nanoimprint Lithography, Step and Flash Imprint Lithography, Dip Pen Nanolithography, and Molecular Transfer lithography. Molecular self assembly techniques continue to improve, as do the processes to grow CNTs. Processes to grow nanoparticles also continue to evolve, as do the means to manipulate both CNTs, nanoparticles, and molecules.

The focus of this session are the processes necessary grow nanoscale materials, form patterns (either lithographically or through self assembly), and pattern transfer (or manipulate) features to form the final desired structures. Devices formed using these properties are of great interest.. Suggested topics include, but are not limited to:

Impacted Industries

• Semiconductor
• Electronics
• Lithography
• Nanoprocessing
• Nanofabrication
• Characterization